This work explores the electric field induced strain mechanisms in environmentally benign Bi0.5Na0.5TiO3 (BNT) based piezoelectric thin films. Although BNT-based materials show promise as replacements for toxic Pb-based piezoelectrics, the displacement mechanisms are not consistent between thin films and bulk materials, and the differences have yet to be well understood....
Optimized processing conditions for
Pt/TiO₂/SiO₂/Si templating electrodes were investigated. These
electrodes are used to obtain [111] textured thin film lead
zirconate titanate (Pb[ZrₓTi₁₋ₓ]O₃ 0≤x≤1) (PZT). Titanium
deposited by dc magnetron sputtering yields [0001] texture on a
thermally oxidized Si wafer. It was found that by optimizing
deposition time, pressure, power,...