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Filtering by: Subject Integrated circuits -- Defects -- Statistical methods Date 2003

Fault probability and confidence interval estimation of random defects seen in integrated circuit processing

Creator:

Hu, David T.

Abstract:

Various methods of estimating the fault probabilities based on defect data of random defects seen in integrated circuit manufacturing are examined. Estimates of fault probabilities based on defect data are less costly than those based on critical area analysis and are potentially more reliable because they are based on actual...

Resource Type:

Masters Thesis

Full Text:

) probability density function of defect size x IC integrated circuit ISEF island etch KR kill ratio X average