Graduate Thesis Or Dissertation
 

Substrate noise coupling analysis in 0.18um silicon germanium (SiGe) and silicon on insulator (SOI) processes

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https://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/sj139490z

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  • Analysis of substrate noise coupling has been performed for a 0.18¹m lightly doped silicon germanium BiCMOS process. Techniques to minimize noise coupling in the chip and board design are presented, as well as methods for accurate modeling for substrate noise coupling simulations. Measurements from a test chip were taken to verify that the modeling approach used in simulation and the substrate noise model obtained using Silencer! is accurate to within 10%. The effects of a deep trench moat structure, bulk separation, and die perimeter ring were also tested as possible noise reduction methods. Strategies for simulation and measurement of substrate noise coupling in a 0.18¹m SOI process are also presented.
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