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Browsing Theses, Dissertations and Student Research Papers (Chemistry) by Author

Browsing Theses, Dissertations and Student Research Papers (Chemistry) by Author "Lerner, Michael K."

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Photoresist and ion-exchange chemistry of HafSOx

Telecky, Alan J. (2012-05-01)

The chemistry of hafnium oxide based and materials are described in the context of ion exchange and lithography. HafSOx, represented by the composition HfO₂₋[subscript x](SO₄)x, is described to possess a significant capa ...