Abstract:
The focus of this thesis involves developing general fabrication processes relevant
to the manufacture of two new devices for the Microscale technology Energy and
Chemical Systems (MECS) program at Oregon State University. The two MECS
devices developed, capture dots and transparent thin-film heaters (TTFHs), require
unique process development for successful manufacture. Thick photolithography is
required for the capture dots and its development is detailed. The capture dots
also require copper electroplating. The copper electroplating system and process
development are detailed. The TTFHs require a unique heater material, indium
tin oxide (ITO). The heater deposition utilizes an ultrasonic lift-off method, also
detailed. The complete manufacturing process steps of both the capture dots and
the TTFHs are described. Both devices are successfully demonstrated and their
electrical properties are discussed.
