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Fabrication and characterization of thin-film electromagnetic coils and heaters for microchannel applications

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dc.contributor.advisor Plant, Thomas K.
dc.creator Dehuff, Nicole L.
dc.date.accessioned 2011-08-16T15:42:25Z
dc.date.available 2011-08-16T15:42:25Z
dc.date.copyright 2005-03-07
dc.date.issued 2005-03-07
dc.identifier.uri http://hdl.handle.net/1957/22623
dc.description Graduation date: 2005 en_US
dc.description.abstract The focus of this thesis involves developing general fabrication processes relevant to the manufacture of two new devices for the Microscale technology Energy and Chemical Systems (MECS) program at Oregon State University. The two MECS devices developed, capture dots and transparent thin-film heaters (TTFHs), require unique process development for successful manufacture. Thick photolithography is required for the capture dots and its development is detailed. The capture dots also require copper electroplating. The copper electroplating system and process development are detailed. The TTFHs require a unique heater material, indium tin oxide (ITO). The heater deposition utilizes an ultrasonic lift-off method, also detailed. The complete manufacturing process steps of both the capture dots and the TTFHs are described. Both devices are successfully demonstrated and their electrical properties are discussed. en_US
dc.language.iso en_US en_US
dc.subject.lcsh Electromagnetic devices -- Design and construction en_US
dc.subject.lcsh Electric coils -- Design and construction en_US
dc.subject.lcsh Microelectromechanical systems -- Design and construction en_US
dc.title Fabrication and characterization of thin-film electromagnetic coils and heaters for microchannel applications en_US
dc.type Thesis/Dissertation en_US
dc.degree.name Master of Science (M.S.) in Electrical and Computer Engineering en_US
dc.degree.level Master's en_US
dc.degree.discipline Engineering en_US
dc.degree.grantor Oregon State University en_US
dc.description.digitization File scanned at 300 ppi (Monochrome, 256 Grayscale) using Capture Perfect 3.0.82 on a Canon DR-9080C in PDF format. CVista PdfCompressor 4.0 was used for pdf compression and textual OCR. en_US
dc.description.peerreview no en_us


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