Kinetic study on the production of silicon nitride by direct nitridation of silicon in a fluidized bed : experiment and modeling

Jovanovic, Zoran R.

Name: JovanovicZoran1995.pdf

Size: 13.11Mb

Format: PDF

Description: Kinetic study on the production of silicon nitride by direct nitridation of silicon in a fluidized bed : experiment and modeling.pdf

Date: 1994-08-30

Graduation date: 1995

Advisor: Kimura, Shoichi

Subject: Silicon nitride
Nitriding
Fluidization -- Mathematical models

This item appears in the following Collection(s)