On the Properties and Characteristics of Solution Processed Hafnium Based Thin-Films from Aqueous Precursors

Graduate Thesis Or Dissertation

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Citeable URL: https://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/2801pn072

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Attribute Name	Values
Creator	Decker, Shawn R.
Abstract	Aqueous hydroxo Hf nanoclusters enable studies to identify and codify steps in the deposition of Hf-based oxide thin films from solution precursors. HfOCl2 reacts with combinations of H2O2(aq), acids, and TMAH to produce polymetal species at high pH and low pH. X-ray scattering and spectroscopic methods reveal the nature of these species in solution, while temperature-programmed desorption coupled with a suite spectroscopic techniques detail their chemical changes as they transition to condensed thin films. Three precursors were studied in this work: -- hafnium peroxide hydroxide nitrate Hf(O2)0.5(OH)1.8(NO3)1.2 (HafNOx) -- the photoresist Hf(O2)0.5(OH)1.6(SO4)0.7 (HafSOx) -- the hexameric cluster ((CH3)4N)6Hf6(O2)6(OH)18 (TMAHfOx).
License	All rights reserved
Resource Type	Dissertation
Date Available	2017-06-26T22:59:19+00:00
Date Issued	2017-06-15
Degree Level	Doctoral
Degree Name	Doctor of Philosophy (Ph.D.)
Degree Field	Chemistry
Degree Grantor	Oregon State University
Commencement Year	2017
Advisor	Keszler, Douglas
Committee Member	Subramanian, Mas Gibbons, Brady Tate, Janet Lerner, Mike
Academic Affiliation	Chemistry
Non-Academic Affiliation	Oregon State University. Graduate School
Rights Statement	In Copyright
Publisher	Oregon State University
Peer Reviewed	No
Language	English [eng]
Replaces	http://hdl.handle.net/1957/61585

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