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Filtering by: Creator Noble, Darren Remove constraint Creator: Noble, Darren Academic Affiliation Chemical, Biological and Environmental Engineering Remove constraint Academic Affiliation: Chemical, Biological and Environmental Engineering

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  • Characterization and Investigations of Thin-Film Materials with X-ray Photoelectron Spectroscopy

    Creator:
    Diulus, J. Trey
    Abstract:
    Surface characterization of materials is widely utilized over a range of disciplines and essential to the development of new materials, technology, or processes. Metal oxide nanoclusters have shown promise as potential new generation photoresist materials for extreme ultraviolet (EUV) nanolithography. Organotin clusters have been proposed as potential candidates for resist...
    Resource Type:
    Dissertation
    Full Text:
    Darren Johnson’s lab. Greg Herman provided contributions towards experimental design and