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Filtering by: Creator Pham, Loan Academic Affiliation Chemical Engineering

Fault probability and confidence interval estimation of random defects seen in integrated circuit processing

Creator:

Hu, David T.

Abstract:

Various methods of estimating the fault probabilities based on defect data of random defects seen in integrated circuit manufacturing are examined. Estimates of fault probabilities based on defect data are less costly than those based on critical area analysis and are potentially more reliable because they are based on actual...

Resource Type:

Masters Thesis

Full Text:

. Loan Pham, my wife, for her unwavering love and support of me while raising our newborn son, Patrick