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Filtering by: Alternative title ssim EM 8979 Academic Affiliation College of Forestry

Mechanical stability of ultrathin Ge/Si film on SiO2: The effect of Si/SiO2 interface

Creator:

Huang, Minghuang, Nairn, John A., Liu, Feng, and Lagally, M. G.

Abstract:

We perform two-dimensional linear elastic finite element analysis to investigate the mechanical stability of ultrathin Ge/Si film grown on or bonded to SiO₂, using imperfect interface elements between Si and SiO₂ to model Si/SiO₂ interfacial slippage. We demonstrate that the overall composite film is stable when only the tangential slippage...

Resource Type:

Article

Full Text:

. We perform FEA using theJANFEA software8 and em- ploy imperfect interface elements9,10 to model the