Search Constraints

Start Over
Filtering by: Creator Khanna, Satya Pal Remove constraint Creator: Khanna, Satya Pal Academic Affiliation Electrical Engineering Remove constraint Academic Affiliation: Electrical Engineering

Search Results

  • The concentration profile of diffused radio-active antimony in a silicon-dioxide layer

    Creator:
    Khanna, Satya Pal
    Abstract:
    The selective masking effect of a thermally grown layer of silicon dioxide has been widely utilized as a technique for controlling the geometry and impurity concentration in semi-conductor device technology. It is also recognized that the passivation of the silicon surface by the vitreous silicon dioxide envelope protects the underlying...
    Resource Type:
    Masters Thesis
    Full Text:
    in a silicon-dioxide layer AN ABSTRACT OF THE THESIS OF SATYA PAL KHANNA for the M. S. in

  • Diffusion of boron and phosphorus in silicon

    Creator:
    Ou, Teh Ming
    Abstract:
    This thesis presents some experimental results for producing controlled PN and NPN diffused structures in silicon by varying the strength of the diffusion sources. Boron diffusions were carried out in a N₂ atmosphere at 1200°C with 10%, 20%, 30% and 40% B₂0₃ in silicic acid as sources. Phosphorus diffusions were...
    Resource Type:
    Masters Thesis
    Full Text:
    extended to Mr. Satya P. Khanna for consultation in preparing this manuscript. TABI,E OF CONTENTS