Much recent research has focused on the development lead-free perovskite piezoelectrics as environmentally compatible alternatives to lead zirconate titanate (PZT). Two main categories of lead free perovskite piezoelectric ceramic systems were investigated as potential replacements to lead zirconate titanate (PZT) for actuator devices. First, solid solutions based on Li, Ta,...
The lead-zirconate-titanate (PZT) solid solution system is currently the workhorse of piezoelectric-based microelectromechanical systems (MEMS) research. Among bulk materials it is known to be one of the strongest piezoelectrics, with extremely high piezoelectric coefficients and electro-mechanical coupling factors. Reproducing these exceptional qualities in thin film form, however, requires precise tuning...
Piezoelectric materials have been widely used in electromechanical actuators, sensors, and ultrasonic transducers. Among these materials, lead zirconate titanate Pb(Zr[subscript 1‐x]Ti[subscript x])O₃ (PZT) has been primarily investigated due to its excellent piezoelectric properties. However, environmental concerns due to the toxicity of PbO have led to investigations into alternative materials systems....