The structural and stress changes in molybdenum/amorphous silicon (Mo/a-Si)
EUV reflecting multilayers during annealing at 316°C were studied. The amorphous
interlayers, with an Mo:Si stoichiometry of 1:2, grew during annealing. The residual
stresses in each component of the multilayer also changed significantly. Through high
resolution electron microscopy, selected area electron...
Polylactic acid (PLA), a renewable material, is used widely in a variety of commercial and specialty applications. However, certain limitations such as high temperature stability and brittleness limit its applicability. This problem is addressed by reinforcing PLA with a variety of materials but the process gives rise to different issues...