Micromanufacturing consists of processes for producing structures, devices or systems with feature sizes measured in micrometers. Micromanufacturing began in the mid-1960's with microelectronics fabrication technology. In the 1980's, Micro-Electro-Mechanical Systems (MEMS) began to be developed, in which electrical and mechanical subsystems were integrated at small scales. More recently, Microtechnology-based Energy...