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  • The use of electrochemical micromachining for making a microfloat valve

    Creator:
    Park, Sang-Bin
    Abstract:
    Micromanufacturing consists of processes for producing structures, devices or systems with feature sizes measured in micrometers. Micromanufacturing began in the mid-1960's with microelectronics fabrication technology. In the 1980's, Micro-Electro-Mechanical Systems (MEMS) began to be developed, in which electrical and mechanical subsystems were integrated at small scales. More recently, Microtechnology-based Energy...
    Resource Type:
    Masters Thesis
    Full Text:
    MicroElectroMechanical Systems Microtechnology-based Energy and Chemical Systems Oregon State UniverSIty

  • Modeling and simulation methods for RF MEMS VCOs

    Creator:
    Sankaranarayanan, Janakiram Ganesh
    Abstract:
    This work focusses on the modeling and the development of efficient coupled simulation techniques for MEMS based RF oscillators. High-level models for MEMS based varactors have been discussed and their accuracy issues are identified, based on comparisons with numerical simulations. A faster simulation approach based on the time-domain shooting method...
    Resource Type:
    Masters Thesis
    Full Text:
    -spring-damper system as shown in Figure 2.2. There are two parallel plates, the top one is restrained by

  • Coupled circuit and device simulations for design of RF MEMS VCOs

    Creator:
    Behera, Manas
    Abstract:
    A new coupled circuit and electrostatic/mechanical simulator (COSMO) for the design of RF MEMS VCOs is presented in this thesis. The numerical solution of device level equations is used to accurately compute the capacitance of a MEMS capacitor. This coupled with a circuit simulator facilitates the simulation of circuits incorporating...
    Resource Type:
    Masters Thesis
    Full Text:
    there are many microelectromechanical system (MEMS) designs that use piezoelectric, thermal, pneumatic

  • Comparison of two microvalve designs fabricated in mild steel using microprojection welding and capacitive dissociation

    Creator:
    Terhaar, Tyson J.
    Abstract:
    Since the dawn of the computer age, there has been a push to create miniature devices. These devices were initially integrated circuit (IC) devices to perform calculations for computers. As the technology progressed, the scope of the devices diverged to included microelectromechanical (MEMS) devices, meaning that the devices perform mechanical...
    Resource Type:
    Masters Thesis
    Full Text:
    microelectromechanical (MEMS) devices, meaning that the devices perform mechanical movements via electrical actuation

  • Synthesis and characterization of Pb(Zr,Ti)O₃ thin films for microelectromechanical systems

    Creator:
    Brookshire, Kirsten L.
    Abstract:
    Pb(Zr,Ti)O₃ (PZT) is a very attractive material for use in piezoelectric-based microelectromechanical systems (MEMS) due to its high piezoelectric coefficients and ability for large displacements with relatively low applied fields (as compared to electrostatic-based MEMS). The piezoelectric effect is strongly anisotropic, thus it is very desirable to control the crystallographic...
    Resource Type:
    Masters Thesis
    Full Text:
    for Microelectromechanical Systems Abstract approved

  • Modeling radiation and hydrogen production in a radioisotope micro-power source

    Creator:
    Misner, Alex C.
    Abstract:
    Radioisotope based power systems have been used for several decades. This research covers a new concept in the field, a radioisotope micro-power source (RIMS). A RIMS cell consists of a radioactive source, a hydrogenous material, and a hydrogen fuel cell. The fuel cell is powered by hydrogen separated from the...
    Resource Type:
    Masters Thesis

  • Development of perovskite thin films for use in piezoelectric based microelectromechanical systems

    Creator:
    Shelton, Christopher T.
    Abstract:
    The lead-zirconate-titanate (PZT) solid solution system is currently the workhorse of piezoelectric-based microelectromechanical systems (MEMS) research. Among bulk materials it is known to be one of the strongest piezoelectrics, with extremely high piezoelectric coefficients and electro-mechanical coupling factors. Reproducing these exceptional qualities in thin film form, however, requires precise tuning...
    Resource Type:
    Masters Thesis
    Full Text:
    solution system is currently the workhorse of piezoelectric-based microelectromechanical systems (MEMS

  • CAE-based process designing of powder injection molding for thin-walled micro-fluidic device components

    Creator:
    Urval, Roshan
    Abstract:
    Powder injection molding (PIM) is a net fabrication technique that combines the complex shape-forming ability of plastic injection molding, the precision of die-casting, and the material selection flexibility of powder metallurgy. For this study, the design issues related to PIM for fabrication of thin-walled high-aspect ratio geometries were investigated. These...
    Resource Type:
    Masters Thesis
    Full Text:
    reducing part thickness, process parameters, microscale surface geometry and delivery system design on the

  • Fabrication and characterization of thin-film electromagnetic coils and heaters for microchannel applications

    Creator:
    Dehuff, Nicole L.
    Abstract:
    The focus of this thesis involves developing general fabrication processes relevant to the manufacture of two new devices for the Microscale technology Energy and Chemical Systems (MECS) program at Oregon State University. The two MECS devices developed, capture dots and transparent thin-film heaters (TTFHs), require unique process development for successful...
    Resource Type:
    Masters Thesis
    Full Text:
    electroplating. The copper electroplating system and process development are detailed. The TTFHs require a