2 μm average sized silicon powder was nitrided with 90% N₂/10% H₂ in a
fluidized-bed reactor, operated at 1200°C, 1250°C and 1300°C. To fluidize silicon
powder, alumina particles with an average size of 300 μm were used as an inert fluidizing
conditioner. The feasibility and operating conditions of the fluidization...