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  • Electrochemical etch characteristics of (100) silicon in tetramethyl ammonium hydroxide

    Creator:
    Watts, Paul E.
    Abstract:
    A study of potentiostatic and galvanostatic electrochemical etching of silicon in tetramethylammonium hydroxide (TMAH) has been carried out. In TMAH baths,, we find that biased (100) silicon etch rates increase 21% over OCP etch rates. For TMAH baths seasoned with silicon, biased silicon etch rates increase to 63% over those...
    Resource Type:
    Masters Thesis
    Full Text:
    the silicon etching surface. The wafer chuck, discussed above, was immersed in the tank and secured

  • The effect of etches on surface recombination in silicon

    Creator:
    Cheng, Dan Sang
    Abstract:
    This thesis presents a limited investigation of the effects of various etches on the surface properties of silicon. Surface recombination velocities of silicon under different etching treatments are compared by using the photoelectromagnetic effect. A measure of the minority carriers lifetime by the photoconductive decay method provides another means of...
    Resource Type:
    Masters Thesis
    Full Text:
    35 EFFECTS OF ETCHING ON SURFACE RECOMBINATION IN SILICON INTRODUCTION The simple band

  • Reactively sputtered films of silicon nitride for diffusion masking

    Creator:
    Delzer, Dennis Richard
    Abstract:
    The experimental procedure for reactively sputtering films of silicon nitride together with the methods for measuring the film thickness have been investigated. Some of the properties of these nitride films were studied. These properties included: infrared spectrum, etching properties, and index of refraction. The adherence of the films was also...
    Resource Type:
    Masters Thesis
    Full Text:
    properties of the silicon nitride films. These properties include infrared spectrum, etching tests, and

  • Hydrodynamics of droplet impingement on heated surfaces : effects of nanofluid and nano-structured surface

    Creator:
    Shen, Jian
    Abstract:
    This study investigates the hydrodynamic characteristics of droplet impinging on heated surfaces using High Speed High Resolution (HSHR) imaging and evaluates the effect of surface temperature and using water and a nanofluid on a polished and a nano-structured surface. Three types of surfaces are used in the study: polished silicon,...
    Resource Type:
    Dissertation
    Full Text:
    coated polished silicon. Seven different surface temperatures including single phase (non-boiling