Because of its attractive material properties like high hardness, high toughness, and excellent high temperature strength, materials like silicon nitride are becoming more common for use in high performance applications. However, there have been limited studies of the fatigue behavior of small cracks in silicon nitride and other materials toughened...
The factors influencing the direct nitridation of silicon, including the effects of the native oxide layer covering the surface of silicon, the effects of hydrogen contained in the nitridation gas and the catalytic effects of metals added to the raw material silicon, were investigated, using a tubular flow reactor and...
An 89 mm-diameter vertical tubular-flow reactor was used to study the kinetics of nano-sized silicon nitride powder synthesis via the animonolysis of SiO vapor at temperatures ranging from 1300°C to 1400°C. The SiO generation rate was controlled by adjusting the mass of SiO particles initially charged in the SiO generator,...
2 μm average sized silicon powder was nitrided with 90% N₂/10% H₂ in a
fluidized-bed reactor, operated at 1200°C, 1250°C and 1300°C. To fluidize silicon
powder, alumina particles with an average size of 300 μm were used as an inert fluidizing
conditioner. The feasibility and operating conditions of the fluidization...
Four types of microchannel reactors were built, using a combination of smallest alumina-tubes commercially available, for testing the feasibility of applying high-temperature microchannel reactors to the ammonolysis of SiO for producing nano-sized silicon nitride powder. The innermost tube used for feeding SiO vapor had an inner diameter (ID) of about...
The experimental procedure for reactively sputtering
films of silicon nitride together with the methods for
measuring the film thickness have been investigated.
Some of the properties of these nitride films were studied.
These properties included: infrared spectrum,
etching properties, and index of refraction. The adherence
of the films was also...
Concentrically arranged multiple-tube reactors with different dimensions were
built for synthesizing nano-sized silicon nitride powder via the ammonolysis of SiO
vapor. The reaction was operated at temperatures ranging from 1350 to 1400°C and
pressure slightly above atmospheric pressure. Silicon monoxide (SiO) vapor was
generated by charging argon gas through a...
An alumina microreactor was designed and fabricated to study the synthesis of nanosized silicon nitride powder via the ammonolysis of SiO vapor at temperatures ranging from 1300°C to 1400°C. It is the first high temperature ceramic microreactor capable of operating at temperatures upto 1600°C. The microreactor was designed using 3D...