An inorganic aqueous precursor for the deposition of ZrO2 thin films via spincoating
was developed. Hydrolysis and condensation chemistries of
ZrOCl₂·8H₂O were used as the principal reactions to guide the synthesis.
Refractive index, n, for a film annealed at 300 °C at 550 nm was measured to
be n=1.97 by...