Atomic layer deposition of two dimensional MoS₂ on 150 mm substrates Public Deposited

http://ir.library.oregonstate.edu/concern/articles/h128nk00p

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This is the publisher’s final pdf. The article is copyrighted by American Vacuum Society and published by American Institute of Physics . It can be found at:  http://scitation.aip.org/content/avs/journal/jvsta/34/2/10.1116/1.4941245

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  • Valdivia, A., Tweet, D. J., & Conley Jr, J. F. (2016). Atomic layer deposition of two dimensional MoS2 on 150 mm substrates. Journal of Vacuum Science & Technology A, 34(2), 021515. doi:10.1116/1.4941245
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