A multiple solution, laboratory-scale delivery system and its applications Public Deposited

http://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/1c18dh889

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  • Researchers around the world use various solution-based deposition techniques to deposit thin films with multiple layers that typically require multiple rounds of deposition. Some such techniques include successive ionic layer adsorption and reaction (SILAR), and layer-by-layer (LBL) deposition. One of the main issues with deposition of these types of films is the labor intensive aspect. The SILAR and LBL techniques typically take from tens of minutes to hours for deposition. The laborious processes hinder the application of these techniques for the fabrication of more complex film structures such as functionally graded films. The need for a programmable and more flexible process inspired the research and development for a laboratory scale system that could deliver the precursor solutions on-demand. The system features an in-situ mixing capability that is ideal for the fabrication of functionally graded thin films. The prototype system presented in this work is currently called multiple solution delivery system. This system was originally envisioned to be paired with a spin coater such that a researcher could program recipes in the system and spin coater, start operation and leave the system to deliver the solutions when necessary. This would allow the researcher to spend time on other, more cognitively challenging endeavors while the deposition took place. It would also relieve the researcher from the duty of preparing several solutions of different concentrations as the system could mix solutions to create a delivered solution of different concentrations for different layers. After intensive research into available systems, and several rounds of discussion on the system requirements, it was decided that a custom system was most appropriate. A design process was used to design the system. A syringe pump based delivery system was chosen for the ease of varying reservoir size and resolution of dispensing. The system went through multiple revisions, pre and post construction. The final embodiment was calibrated, further tested for mixing and paired with a spin coater for thin film deposition. Documentation, in the form of a component list, operations manual and commented code, was also prepared and is presented.
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