%0 Graduate Thesis Or Dissertation %T Atomic layer deposition of nanolaminate Al₂O₃-Ta₂O₅ and ZnO-SnO₂ films %A Smith, Sean Weston %8 2011-04-01 %I Oregon State University %R http://localhost/files/1j92gc46n %G http://id.loc.gov/vocabulary/iso639-2/eng %[ 2021-08-05 %9 Masters Thesis %~ ScholarsArchive@OSU %W Oregon State University