Graduate Thesis Or Dissertation
 

Microwave methods of measuring resistivity of gallium arsenide

Público Deposited

Contenido Descargable

Descargar PDF
https://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/1z40kx06j

Descriptions

Attribute NameValues
Creator
Abstract
  • This paper is concerned with the determination of gallium arsenide resistivity by measurement of attenuation of microwave energy at 7500 megacycles transmitted through a slice. The first section of this paper describes gallium arsenide properties as compared to silicon, germanium, silicon carbide, and diamond. A description is then given of the method used by industry to determine the resistivity of gallium arsenide by the conventional four-point probe method. Various methods of resistivity measurement are discussed in the second section before taking up microwave methods in the third section. A discussion of the various microwave methods of resistivity evaluation then follows. It is found that it is feasible to measure the resistivity of "N" and "P" type gallium arsenide, of both the single and polycrystalline varieties, by the method of microwave transmission through a slice of semiconductor inserted transversally in a waveguide. The results of this investigation show that resistivity evaluation by the microwave method used should be accurate to within plus or minus five percent. With due consideration given to accuracy of observations and quality of instrumentation, the results of resistivity measurement by microwave means should fall within the five percent accuracy usually attributed to the conventional four-point probe method. By utilizing one of the microwave methods discussed in this paper it should be possible to cover the range of resistivities encountered in gallium arsenide crystal manufacture.
Resource Type
Fecha Disponible
Fecha de Emisión
Degree Level
Degree Name
Degree Field
Degree Grantor
Commencement Year
Advisor
Academic Affiliation
Non-Academic Affiliation
Subject
Declaración de derechos
Publisher
Peer Reviewed
Language
Digitization Specifications
  • File scanned at 300 ppi using ScandAll PRO 1.8.1 on a Fi-6770A in PDF format. CVista PdfCompressor 4.0 was used for pdf compression and textual OCR.
Replaces

Relaciones

Parents:

This work has no parents.

En Collection:

Elementos

Miniatura Título Fecha de subida Visibilidad Acciones
file details QuinnAlexander1966.pdf 2017-08-16 Público Descargar