Thermal conductivity measurements of amorphous metal thin films via the 3ω method Public Deposited

http://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/3f4629879

Descriptions

Attribute NameValues
Alternative Title
Creator
Abstract or Summary
  • Amorphous multicomponent metals have promising applications in novel electronic devices because of their atomically smooth surface morphology and lack of grain boundaries. It is important to understand the thermal transport properties of amorphous metals and an accurate measurement of their thermal conductivity will be essential for further improvement of device performance and reliability. Here, the 3ω method has been improved and extended to investigate the room temperature thermal conductivity of amorphous metals. Iterative, amorphous multicomponent metallic films are deposited on silicon substrate by magnetron sputter deposition. A thin layer of hafnium oxide film is deposited on top of amor­ phous metals by atomic layer deposition, providing a reliable insulation between an aluminum heater and the amorphous metal film. The room temperature thermal conductivities of thin-film hafnium oxide and silicon nitride are also measured to demonstrate the capability and reliability of the 3ω technique.
License
Resource Type
Date Available
Date Copyright
Date Issued
Degree Level
Degree Name
Degree Field
Degree Grantor
Commencement Year
Advisor
Committee Member
Academic Affiliation
Non-Academic Affiliation
Subject
Rights Statement
Peer Reviewed
Language
Replaces
Additional Information
  • description.provenance : Approved for entry into archive by Laura Wilson(laura.wilson@oregonstate.edu) on 2014-10-24T17:53:04Z (GMT) No. of bitstreams: 2 license_rdf: 1370 bytes, checksum: cd1af5ab51bcc7a5280cf305303530e9 (MD5) ZhanKai2014.pdf: 13839752 bytes, checksum: 47a6c4f1aa231cd4cdcb660f1a894c3c (MD5)
  • description.provenance : Submitted by Kai Zhan (zhank@onid.orst.edu) on 2014-10-20T22:53:57Z No. of bitstreams: 2 license_rdf: 1370 bytes, checksum: cd1af5ab51bcc7a5280cf305303530e9 (MD5) ZhanKai2014.pdf: 13839752 bytes, checksum: 47a6c4f1aa231cd4cdcb660f1a894c3c (MD5)
  • description.provenance : Approved for entry into archive by Julie Kurtz(julie.kurtz@oregonstate.edu) on 2014-10-23T16:32:19Z (GMT) No. of bitstreams: 2 license_rdf: 1370 bytes, checksum: cd1af5ab51bcc7a5280cf305303530e9 (MD5) ZhanKai2014.pdf: 13839752 bytes, checksum: 47a6c4f1aa231cd4cdcb660f1a894c3c (MD5)
  • description.provenance : Made available in DSpace on 2014-10-24T17:53:04Z (GMT). No. of bitstreams: 2 license_rdf: 1370 bytes, checksum: cd1af5ab51bcc7a5280cf305303530e9 (MD5) ZhanKai2014.pdf: 13839752 bytes, checksum: 47a6c4f1aa231cd4cdcb660f1a894c3c (MD5) Previous issue date: 2014-09-19

Relationships

In Administrative Set:
Last modified: 10/21/2017

Downloadable Content

Download PDF
Citations:

EndNote | Zotero | Mendeley

Items