Assessment of Barrier Heights between ZrCuAlNi Amorphous Metal and SiO₂, Al₂O₃, HfO₂, and ZrO₂ using Internal Photoemission Spectroscopy Public Deposited

http://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/3t945w53h

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  • As scaling of silicon (Si) based devices approaches fundamental limits, thin film metal-insulator-metal (MIM) tunnel diodes are attracting interest due to their potential for high speed operation. Because operation of these devices is based on tunneling, electrode / interfacial roughness is critical. Recently, it was shown that combining ultra-smooth bottom electrodes with insulators deposited via atomic layer deposition (ALD) enables reproducible fabrication of MIM diodes with stable I-V behavior. Key performance parameters of MIM diodes include high I-V asymmetry and low turn-on voltage. The standard way to achieve asymmetry relies on the use of non-equivalent work function metal electrodes to induce a built-in field that creates polarity dependent electron tunneling barrier. Thus the electrical performance of MIM diodes are directly impacted by the nature of the energy barriers at the interfaces. In this work, we report the first use of internal photoemission spectroscopy (IPE) to measure barrier heights between an amorphous zirconium copper aluminum nickel (ZCAN) metal alloy bottom electrode and several high-k dielectrics deposited via ALD. In IPE, the conduction band offset between two materials is characterized by measuring the additional current created by photo-excitation of carriers under an applied bias (V[subscript app]). Devices were tested in a custom built IPE system.
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  • description.provenance : Submitted by Tyler Klarr (klarrt@oregonstate.edu) on 2016-07-05T05:33:31Z No. of bitstreams: 2 license_rdf: 1232 bytes, checksum: bb87e2fb4674c76d0d2e9ed07fbb9c86 (MD5) Tyler Thesis Final Submission.pdf: 5888202 bytes, checksum: f51b65843d3e96d9532beb2320edff1b (MD5)
  • description.provenance : Submitted by Tyler Klarr (klarrt@oregonstate.edu) on 2016-07-11T06:08:18Z No. of bitstreams: 2 license_rdf: 1232 bytes, checksum: bb87e2fb4674c76d0d2e9ed07fbb9c86 (MD5) Tyler Thesis Final.pdf: 5971421 bytes, checksum: 6e7d8f2ed971d8f23d6023d5d2876e45 (MD5)
  • description.provenance : Made available in DSpace on 2016-08-09T19:06:10Z (GMT). No. of bitstreams: 2 license_rdf: 1232 bytes, checksum: bb87e2fb4674c76d0d2e9ed07fbb9c86 (MD5) Tyler Thesis Final.pdf: 5971421 bytes, checksum: 6e7d8f2ed971d8f23d6023d5d2876e45 (MD5) Previous issue date: 2016-05-20
  • description.provenance : Approved for entry into archive by Julie Kurtz(julie.kurtz@oregonstate.edu) on 2016-08-09T17:00:40Z (GMT) No. of bitstreams: 2 license_rdf: 1232 bytes, checksum: bb87e2fb4674c76d0d2e9ed07fbb9c86 (MD5) Tyler Thesis Final.pdf: 5971421 bytes, checksum: 6e7d8f2ed971d8f23d6023d5d2876e45 (MD5)
  • description.provenance : Rejected by Julie Kurtz(julie.kurtz@oregonstate.edu), reason: Rejecting to submit the final thesis after major professor's approval. Everything looked good except on the bottom of the title page the commencement date needs to be changed so it reads- Commencement June 2017 Also on the Approval page, on the first two signature lines, remove the names, John Conley and V. John Matthews so the first signature line reads as - Major Professor, representing Electrical and Computer Engineering and the second signature line reads as - Director of the School of Electrical Engineering and Computer Science. Once revised, log back into ScholarsArchive and go to the upload page. Replace the attached file with the revised PDF and resubmit. Thanks, Julie on 2016-07-07T19:11:59Z (GMT)
  • description.provenance : Approved for entry into archive by Laura Wilson(laura.wilson@oregonstate.edu) on 2016-08-09T19:06:10Z (GMT) No. of bitstreams: 2 license_rdf: 1232 bytes, checksum: bb87e2fb4674c76d0d2e9ed07fbb9c86 (MD5) Tyler Thesis Final.pdf: 5971421 bytes, checksum: 6e7d8f2ed971d8f23d6023d5d2876e45 (MD5)
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