Graduate Thesis Or Dissertation
 

Fabrication and characterization of thin-film electromagnetic coils and heaters for microchannel applications

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https://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/9w032575z

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  • The focus of this thesis involves developing general fabrication processes relevant to the manufacture of two new devices for the Microscale technology Energy and Chemical Systems (MECS) program at Oregon State University. The two MECS devices developed, capture dots and transparent thin-film heaters (TTFHs), require unique process development for successful manufacture. Thick photolithography is required for the capture dots and its development is detailed. The capture dots also require copper electroplating. The copper electroplating system and process development are detailed. The TTFHs require a unique heater material, indium tin oxide (ITO). The heater deposition utilizes an ultrasonic lift-off method, also detailed. The complete manufacturing process steps of both the capture dots and the TTFHs are described. Both devices are successfully demonstrated and their electrical properties are discussed.
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  • File scanned at 300 ppi (Monochrome, 256 Grayscale) using Capture Perfect 3.0.82 on a Canon DR-9080C in PDF format. CVista PdfCompressor 4.0 was used for pdf compression and textual OCR.
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