Establishing Thermally-Enhanced Edge Registration (TEER) as a feasible alignment technique for metallic microlaminated devices Public Deposited

http://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/c247dv34z

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  • The paper describes a Thermally-Enhanced Edge Registration (TEER) technique for precision aligning large numbers of laminae in diffusion bonding processes. This technique is particularly relevant for the formation of micro heat exchangers and microreactors requiring highly paralleled microchannel arrays but is also being used to register other laminated devices with precision alignment requirements such as ion traps for quantum computing. The technique uses the difference in thermal expansion between a graphite fixture and metallic laminae to produce a registration force at the bonding temperature. At room temperature, a clearance is designed into the graphite fixture to allow for easy loading of the laminae. At the bonding temperature, the laminae interfere with the side of the fixture producing the registration force. The technique has been extensively studied and found to provide an average layer-to-layer misalignment of 5 microns for laminae with a thickness of 75 microns. The technique provides a plausible means for high-volume registration of large quantities of laminae when compared with other techniques.
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