Atomic layer deposition of nanolaminate high-κ gate dielectrics for amorphous-oxide semiconductor thin film transistors Public Deposited

http://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/jw827h100

Descriptions

Attribute NameValues
Creator
Abstract or Summary
  • Nanolaminate dielectrics combine two or more insulating materials in a many-layered film. These structures can be made to significantly outperform films composed of a single one of their constituent materials by adjusting the composition ratio, arrangement, and size of the component layers. In this work, atomic layer deposition (ALD) is used to fabricate pure-oxide and nanolaminate dielectrics based upon Al₂O₃ and ZrO₂. The relative performance of these dielectrics is investigated with respect to application as gate dielectrics for ZnSnO (ZTO) and InGaZnO (IGZO) amorphous-oxide-semiconductor (AOS) thin-film transistors (TFTs). AOS TFTs are promising candidates for commercial use in applications such as active-matrix displays and e-paper. It was found that the layer thickness, relative composition, and interfacial material all had an effect on TFT performance. Several variants of the Al₂O₃/ZrO₂ nanolaminate were found to exhibit superior properties to either Al₂O₃ or ZrO₂ alone.
Resource Type
Date Available
Date Copyright
Date Issued
Degree Level
Degree Name
Degree Field
Degree Grantor
Commencement Year
Advisor
Committee Member
Academic Affiliation
Non-Academic Affiliation
Keyword
Subject
Rights Statement
Language
Replaces
Additional Information
  • description.provenance : Submitted by Joshua Triska (triskaj@onid.orst.edu) on 2011-06-10T00:02:41Z No. of bitstreams: 1 TriskaJoshuaB2011.pdf: 1780295 bytes, checksum: 8fa7b9f02f43a61e6ad0c0764a7f4359 (MD5)
  • description.provenance : Made available in DSpace on 2011-06-10T19:44:14Z (GMT). No. of bitstreams: 1 TriskaJoshuaB2011.pdf: 1780295 bytes, checksum: 8fa7b9f02f43a61e6ad0c0764a7f4359 (MD5)
  • description.provenance : Approved for entry into archive by Julie Kurtz(julie.kurtz@oregonstate.edu) on 2011-06-10T16:51:12Z (GMT) No. of bitstreams: 1 TriskaJoshuaB2011.pdf: 1780295 bytes, checksum: 8fa7b9f02f43a61e6ad0c0764a7f4359 (MD5)
  • description.provenance : Approved for entry into archive by Laura Wilson(laura.wilson@oregonstate.edu) on 2011-06-10T19:44:14Z (GMT) No. of bitstreams: 1 TriskaJoshuaB2011.pdf: 1780295 bytes, checksum: 8fa7b9f02f43a61e6ad0c0764a7f4359 (MD5)

Relationships

In Administrative Set:
Last modified: 10/21/2017

Downloadable Content

Download PDF
Citations:

EndNote | Zotero | Mendeley

Items