%0 Graduate Thesis Or Dissertation %T Atomic layer deposition of nanolaminate high-κ gate dielectrics for amorphous-oxide semiconductor thin film transistors %A Triska, Joshua B. %8 2011-06-10 %I Oregon State University %R http://localhost/files/jw827h100 %G http://id.loc.gov/vocabulary/iso639-2/eng %[ 2021-08-05 %9 Masters Thesis %~ ScholarsArchive@OSU %W Oregon State University