Graduate Thesis Or Dissertation
 

Modeling, Fabrication, and Characterization of Magnetic Thin Films for Integrated Inductor and MRAM Applications

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https://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/rf55zc29x

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  • Magnetic thin films have potential to improve devices such as on-chip inductors, and enable new technologies such as magnetic random access memory (MRAM). The use of magnetic cores in on-chip inductors is typically limited to applications well under 1 GHz. At higher frequencies, the performance of the magnetic core is severely limited by eddy current losses and ferromagnetic resonance. This work investigates the feasibility of using shape anisotropy to increase the ferromagnetic resonance frequency and thus allow the use of thin-film magnetic cores at frequencies up to 3 GHz. Magnetic cores are fabricated on top of existing chip- scale inductors. The effect of core shape and oxide layers, which are added to reduce eddy currents, on the magnetic properties of the film are investigated. Magnetic tunnel junctions (MTJs) are of interest in MRAM and spintronic logic circuit ap- plications due to their non-volatility, low-power operation, and size scalability. One limitation to the creation of scalable magnetic random access memory is thermal stability. For large devices, this energy barrier is proportional to the exchange stiffness of a material. Typically the thermal stability is measured in fabricated MRAM devices, and is used to back-calculate the exchange stiff- ness. This work presents a novel approach which uses images of magnetic domains, in conjunction with vibrating sample magnetometer and ferromagnetic resonance measurements, to measure the exchange stiffness in unpatterned films. This allows for estimation of the thermal stability that can be obtained by a given magnetic free layer without need to fabricate and measure completed de- vices. Using this approach, the exchange stiffness and expected thermal stability in MgO / CoFeB / spacer / CoFeB / MgO free layer structures with various spacer layer materials and thicknesses are compared.
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  • 2017-08-22 to 2018-08-09

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