Graduate Thesis Or Dissertation
 

Epsilon-Near-Zero Transparent Conductive Oxides and the Application in Electro-Absorption Modulators

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https://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/sj1398378

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  • Transparent conductive oxides (TCOs), such as indium-tin oxide (ITO), have attracted increasing interests in integrated photonics and nanophotonics, owing to their large plasma dispersion and epsilon-near-zero (ENZ) effect. The refractive index modulation induced by free carriers in TCOs leads to a large electro-optic effect that can enable ultra-compact device footprint and unprecedented energy efficiency. However, the relatively low free carrier mobility of ITO and the interface between ITO/metal have constrained the high-speed performance of ITO modulators. In this thesis, we started with the optimization of sputtering deposition for ITO to achieve reliable optical and electrical properties. We also deposited high mobility titanium-doped indium oxide (ITiO), which can further improve the E-O modulator performance. On the device aspect, we designed and fabricated an 8-µm-long hybrid plasmonic-silicon modulator driven by an ENZ ITO capacitor, achieving a record of 100fJ/bit energy efficiency, 3.5 GHz modulation bandwidth and 4.5 Gb/s data rate. The electro-absorption modulator covers a broad optical bandwidth from 1515 to 1580 nm wavelength. For future development, we point out that by replacing ITO with high mobility ITiO, we can achieve a modulation bandwidth above 40 GHz and energy efficiency below 5 fJ/bit using a 3-µm-long device.
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  • Pending Publication
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  • 2020-06-19 to 2021-07-20

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