Etching of polyphenylene oxide in a downstream microwave plasma using NF₃, SF₆, O₂ and Ar gas mixtures Public Deposited

http://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/vx021k29n

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  • description.provenance : Approved for entry into archive by Patricia Black(patricia.black@oregonstate.edu) on 2012-06-13T20:15:14Z (GMT) No. of bitstreams: 1 VenkataramanArjun2005.pdf: 15710175 bytes, checksum: 0816567a40722aa82f2d466517c99051 (MD5)
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