- A series of seven magnesium-doped copper scandium oxide films were made by radio frequency sputtering, and intercalated at various oxygen pressures to create different oxygen concentrations in each film. The objectives of this study were to verify the p-type nature of these transparent conductive thin films, to determine the correlation between the Seebeck coefficients and the oxygen intercalation pressures, and to extract an estimate of the carrier concentration. Results of the room temperature Seebeck measurements show that the p-type nature of the carriers persists for all intercalation pressures. Small Seebeck coefficients characteristic of metals corresponded to high oxygen intercalation pressures, whereas larger coefficients characteristic of semiconductors corresponded to low intercalation pressures. One film exhibited intermediate values. Further analysis of the Seebeck coefficients using the Chaikin/Beni method gave reasonable qualitative values for the carrier concentrations of the films.