Thin-Film Dielectric Structure of Spin-Coated ZrO2 from Aqueous Inorganic Solution

Honors College Thesis

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Citeable URL: https://ir.library.oregonstate.edu/concern/honors_college_theses/3b591b78p

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Attribute Name	Values
Creator	Moreno Luna, Hidekel A.
Abstract	An inorganic aqueous precursor for the deposition of ZrO2 thin films via spincoating was developed. Hydrolysis and condensation chemistries of ZrOCl₂·8H₂O were used as the principal reactions to guide the synthesis. Refractive index, n, for a film annealed at 300 °C at 550 nm was measured to be n=1.97 by SE. Thin-films remained amorphous until about 500 °C with slight signs of monoclinic phase at 400 °C, as determined by XRD. FT-IR analysis of thin films showed remaining hydration until 400 °C annealing temperatures. A second order mathematical model was also developed for the metal oxide thickness as a function of precursor concentration with a minimum experimental thickness for this deposition system of 1.02(8) nm.
License	All rights reserved
Resource Type	Honors College Thesis
Date Available	2012-06-26T15:51:04+00:00
Date Issued	2011-10-14
Degree Level	Bachelor's
Degree Name	Honors Bachelor of Science (H.B.S.)
Degree Field	Materials Science
Degree Grantor	Oregon State University
Commencement Year	2012
Advisor	Keszler, Douglas A.
Committee Member	Wang, Wei Lerner, Michael
Non-Academic Affiliation	Oregon State University. Honors College
Rights Statement	In Copyright
Publisher	Oregon State University
Peer Reviewed	No
Language	English [eng]
Replaces	http://hdl.handle.net/1957/30181

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