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Control of Crystallographic Texture and Surface Morphology of Pt/TiO₂ Templates for Enhanced PZT Thin Film Texture

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  • Optimized processing conditions for Pt/TiO₂/SiO₂/Si templating electrodes were investigated. These electrodes are used to obtain [111] textured thin film lead zirconate titanate (Pb[ZrₓTi₁₋ₓ]O₃ 0≤x≤1) (PZT). Titanium deposited by dc magnetron sputtering yields [0001] texture on a thermally oxidized Si wafer. It was found that by optimizing deposition time, pressure, power, and the chamber preconditioning, the Ti texture could be maximized while maintaining low surface roughness. When oxidized, titanium yields [100] oriented rutile. This seed layer has as low as a 4.6% lattice mismatch with [111] Pt, thus it is possible to achieve strongly oriented [111] Pt. The quality of the orientation and surface roughness of the TiO₂ and the Ti directly affect the achievable Pt texture and surface morphology. A transition between optimal crystallographic texture and the smoothest templating surface occurs at approximately 30 nm of original Ti thickness (45 nm TiO₂). This corresponds to 0.5 nm (2 nm for TiO₂) RMS roughness as determined by atomic force microscopy and a FWHM of the rocking curve 0002 (200) peak of 5.5° (3.1° for TiO₂). A Pb[Zr₀.₅₂Ti₀.₄₈]O₃ layer was deposited and shown to template from the textured Pt electrode, with a maximum [111] Lotgering factor of 87% and a minimum 111 FWHM of 2.4° at approximately 30 nm of original Ti.
  • ©2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works. This is an author's peer-reviewed final manuscript, as accepted by the publisher. The published article is copyrighted by IEEE-Institute of Electrical and Electronics Engineers and can be found at: http://www.ieee-uffc.org/publications/tr/ and at: http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=58
  • Keywords: Piezoelectric, Thin Films, Crystallographic Orientation
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  • Fox, A. J., Drawl, B., Fox, G. R., Gibbons, B. J., & Trolier-McKinstry, S. (2015). Control of Crystallographic Texture and Surface Morphology of Pt/TiO₂ Templates for Enhanced PZT Thin Film Texture. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 62(1), 56-61. doi:10.1109/TUFFC.2014.006671
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  • 62
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  • 1
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  • This research was partially sponsored by the Army Research Laboratory and was accomplished under Cooperative Agreement Number W911NF-11-2-0053, the Penn State National Nanotechnology Infrastructure Network (NNIN) node supported by the National Science Foundation, the Oregon State University Graduate School Provost’s Fellowship, and the NSF CAREER Award, grant No. DMR 115170.
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