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Filtering by: Has journal ACS Applied Materials & Interfaces Academic Affiliation Chemical, Biological and Environmental Engineering Creator Frederick, Ryan T.

Amorphous In-Ga-Zn-O thin-film transistors fabricated by microcontact printing

Creator:

Du, Xiaosong, Frederick, Ryan T., Li, Yajuan, Zhou, Zheng, Stickle, William F., and Herman, Gregory S.

Abstract:

The authors present a facile, low-cost methodology to fabricate high-performance In-Ga-Zn-O (IGZO) bottom contact, bottom gate thin-film transistors (TFTs) by soft lithography. The IGZO channel and indium tin oxide (ITO) source and drain were patterned using microcontact printing of an octadecylphosphonic acid self-assembled monolayer (SAM). A polymer stamp was used...

Resource Type:

Article

Full Text:

/ source and drain interfaces, and have high-quality dielec- tric/channel interface. IV. SUMMARY AND
Metal Oxide Cluster Chemistries for Next Generation Nanomanufacturing

Creator:

Frederick, Ryan T.

Abstract:

Metal oxide clusters are promising inorganic photoresists in next generation nanomanufacturing because of their potential for high-resolution and low line-edge roughness patterning, and exceptional sensitivity to extreme ultraviolet (EUV) radiation. In EUV patterning, absorption of EUV radiation leads to electron emission that serve as a primary species for driving radiation...

Resource Type:

Dissertation

Full Text:

material is found near a surface or interface. In Figure 1.1, we illustrate the relative importance of a

ScholarsArchive@OSU

Amorphous In-Ga-Zn-O thin-film transistors fabricated by microcontact printing

Metal Oxide Cluster Chemistries for Next Generation Nanomanufacturing

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