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Filtering by: Creator Chen, Kuei-Lin Remove constraint Creator: Chen, Kuei-Lin Academic Affiliation Chemistry Remove constraint Academic Affiliation: Chemistry Academic Affiliation Mechanical, Industrial, and Manufacturing Engineering Remove constraint Academic Affiliation: Mechanical, Industrial, and Manufacturing Engineering

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  • Reaction Pathways of Oxo-Hydroxo Group 5 Clusters to Metal Oxide Thin Films

    Creator:
    Mansergh, Ryan H.
    Abstract:
    Oxo-hydroxo Group 5 metal clusters are an untapped resource to study and advance aqueous solution processing of metal oxide thin films. The tetramethylammonium (TMA) hexatantalate salt (TMA6[H2Ta6O19]) yields dense Ta2O5 films (~95% of the bulk ß-Ta2O5 density) with atomically smooth surfaces (<4 Å root mean square surface roughness). This same...
    Resource Type:
    Dissertation
    Full Text:
    ) Lin, J.; Masaaki, N.; Tsukune, A.; Yamada, M. Ta2O5 Thin Films with Exceptionally High Dielectric