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Filtering by: Creator Mehlenbacher, S. A. (Shawn A.) Remove constraint Creator: Mehlenbacher, S. A. (Shawn A.) Academic Affiliation Chemistry Remove constraint Academic Affiliation: Chemistry Committee Member Lerner, Michael Remove constraint Committee Member: Lerner, Michael

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  • Metal-oxo Clusters as Novel Photolithographic Materials: How Understanding the Chemistry of HafSOx Informs Next-Generation Patterning Systems

    Creator:
    Amador, Jenn M.
    Abstract:
    The solution chemistry and kinetic behavior of hafnium peroxy sulfate solutions ("HafSOx") is described in terms of peroxide content and solution speciation. Additionally, thin film behavior, including thermal behavior and solubility, is characterized, and a mechanism of patterning is presented, as well as parameters that should be considered when looking...
    Resource Type:
    Dissertation
    Full Text:
    instrument support and data analysis. Chapter 4 is taken from a joint publication with co-author Shawn

  • Investigation of the structural influence on the properties of functional inorganic oxides

    Creator:
    Laurita-Plankis, Geneva
    Abstract:
    While properties are extremely important from an application point of view, it is crucial to have a detailed understanding of the underlying structural influence. Once a concrete correlation between the structure and the observed property is established, rational design of novel materials with optimized properties can be realized. These optimized...
    Resource Type:
    Dissertation
    Full Text:
    manuscript on which this Appendix is based on: Heo , J., Laurita, G., Muir, S., Subramanian, M. A., and

  • Synthesis and characterization of aluminum oxide based materials - from molecule to device

    Creator:
    Wang, Wei
    Abstract:
    A scalable synthesis of the "flat" tridecameric inorganic cluster [Al₁₃(μ₃-OH)₆(μ-OH)₁₈(H₂O)₂₄]¹⁵⁺ has been realized by treating an aqueous aluminum nitrate solution with zinc-metal powder at room temperature. Single crystals and polycrystalline samples are readily obtained in yields exceeding 55% relative to the starting reagent Al(NO₃)₃. Products have been characterized by X-ray...
    Resource Type:
    Dissertation
    Full Text:
    Douglas A. Keszler   A scalable synthesis of the “flat” tridecameric inorganic cluster [Al13(μ3-OH)6

  • Precursor Chemistry and Film Structure and Properties via Solution Deposition

    Creator:
    Huang, Yu
    Abstract:
    Chemistry of preparing dense film from solution deposition is explored with several cases in this thesis. Surface dense structure, conversion at melting point, and ion exchange in aqueous solution are the main topics covered here for the thin films of aluminum oxide phosphate and tin dioxide. Thin film density, optical...
    Resource Type:
    Dissertation
    Full Text:
    films annealed with S in vacuum sealed in glass tube as a function of annealing temperature