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Filtering by: Academic Affiliation Electrical Engineering and Computer Science Subject Dielectrics

Atomic layer deposition of nanolaminate high-κ gate dielectrics for amorphous-oxide semiconductor thin film transistors

Creator:

Triska, Joshua B.

Abstract:

Nanolaminate dielectrics combine two or more insulating materials in a many-layered film. These structures can be made to significantly outperform films composed of a single one of their constituent materials by adjusting the composition ratio, arrangement, and size of the component layers. In this work, atomic layer deposition (ALD) is...

Resource Type:

Masters Thesis
Amorphous oxide semiconductor thin-film transistor ring oscillators and material assessment

Creator:

Sundholm, Eric Steven

Abstract:

Amorphous oxide semiconductor (AOS) thin-film transistors (TFTs) constitute the central theme of this thesis. Within this theme, three primary areas of focus are pursued. The first focus is the realization of a transparent three-stage ring oscillator with buffered output and an output frequency in the megahertz range. This leads to...

Resource Type:

Masters Thesis