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Filtering by: Subject Semiconductor doping Academic Affiliation Electrical Engineering and Computer Science

Atomic Layer Deposition (ALD) Process Development of Nb-doped TiO₂ as a Transparent Conducting Oxide (TCO) and ALD of HfO₂/Nb₂O₅ Bilayers as Insulating Barriers for Metal/Insulator/Insulator/Metal (MIIM) Diodes

Creator:

Lin, Shijia

Abstract:

Transparent conductive oxides (TCOs), primarily indium doped tin oxide, have been widely used in numerous fields since decades ago, such as solar cells, displays, OLEDs and ‘smart windows’ etc. Owing to the scarcity of indium, there is a great demand for new alternative materials. Metal/insulator/metal (MIM) diodes are a critical...

Resource Type:

Masters Thesis

Full Text:

using atomic layer deposition (ALD). Due to potential nucleation delays, doping and formation of