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Filtering by: Subject Silicon compounds Remove constraint Subject: Silicon compounds Academic Affiliation Electrical and Electronics Engineering Remove constraint Academic Affiliation: Electrical and Electronics Engineering Degree Field Electrical and Electronics Engineering Remove constraint Degree Field: Electrical and Electronics Engineering

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  • Vacuum deposition of silicon monoxide for capacitors

    Creator:
    Lo, Joseph Ping Kwan
    Abstract:
    The experimental procedure for evaporating silicon monoxide together with the methods for measuring the film thickness have been investigated. The effects of various process parameters on the rate of deposition, such as source temperature and source-substrate distance, have been studied. The uniformity of silicon monoxide films deposited by this particular...
    Resource Type:
    Masters Thesis
    Full Text:
    Vacuum deposition of silicon monoxide for capacitors AN