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Filtering by: Subject Silicon -- Heat treatment Remove constraint Subject: Silicon -- Heat treatment Advisor Kassner, Michael E. Remove constraint Advisor: Kassner, Michael E.

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  • Changes in structure and stress in Mo/a-Si thin films upon annealing

    Creator:
    Weber, Frank John
    Abstract:
    The structural and stress changes in molybdenum/amorphous silicon (Mo/a-Si) EUV reflecting multilayers during annealing at 316°C were studied. The amorphous interlayers, with an Mo:Si stoichiometry of 1:2, grew during annealing. The residual stresses in each component of the multilayer also changed significantly. Through high resolution electron microscopy, selected area electron...
    Resource Type:
    Masters Thesis
    Full Text:
    /amorphous silicon (Mo/a-Si) EUV reflecting multilayers during annealing at 316°C were studied. The