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Filtering by: Subject Plasma etching Advisor Koretsky, Milo D. Degree Name Doctor of Philosophy (Ph.D.)

Etch products dynamics of polyphenylene oxide laminates using a CF₄/O₂/Ar downstream microwave plasma

Creator:

Hsu, Chia-Chang

Resource Type:

Dissertation

Full Text:

the plasma etching system. And I want to thank Sjamsie Husurianto and Amadou Camara who always