This thesis presents a novel microlamination architecture that enables the large scale integration of valves into low cost micro energy and chemical systems via membrane entrapment. Polycarbonate layers embossed with microfluidic channels were bonded by ultrasonic welding of raised embossed protrusions that penetrate though the PDMS membranes. The bonding pressure...
The paper describes a Thermally-Enhanced Edge Registration (TEER) technique for precision aligning large numbers of laminae in diffusion bonding processes. This technique is particularly relevant for the formation of micro heat exchangers and microreactors requiring highly paralleled microchannel arrays but is also being used to register other laminated devices with...
The miniaturization of energy, chemical and biological systems for distributed and portable applications, known as process intensification, is realized by the enhancement in heat and mass transfer performance within high surface-to-volume ratio microchannels. Fabrication of devices for process intensification is achieved in part by microlamination techniques. These techniques consist of...
Several 316 stainless steel meso-scopic devices were made using a diffusion
soldering process. Tensile strength and pressure drop of the devices were
measured and metallurgical examinations were made of the joints. Continuous
bonds were observed in the sample cross-section specimens. Strengths of the
diffusion soldered joints were up to 56%...
The miniaturization of Microtechnology-based Energy, Chemical and Biological Systems (MECS) is made possible by the use of high aspect ratio microchannel arrays to increase the surface-area-to-volume ratio of the flow conduits within the devices, resulting in an improvement in the heat and mass transfer performance of the devices. However, advantages...
A significant barrier to the diffusion bonding of large (i.e. 600 mm) microchannel devices is the large capital investment required to setup production. This large capital investment extends from long heating and cooling cycles leading to poor production
capacities. Empirical studies in industry have shown that cooling rate is limited...
Diffusion bonding has been widely used within microlamination architectures for the fabrication of Micro Energy and Chemical Systems (MECS). MECS are microsystems with the ability to process bulk amounts of fluid within highly-parallel microchannel arrays capable of accelerated heat and mass transfer. Thus far, diffusion bonding of the microchannel arrays...
A novel design, material, and fabrication method are presented to fabricate a passive micro-ball valve. Microvalves are critical components in microflow control devices used to control the fluid flows in microchannels. These microflow control devices can be integrated with microsensors to form micro analysis systems. Glass/silicon-based fabrication is complicated and...
Micromanufacturing consists of processes for producing structures, devices or systems with feature sizes measured in micrometers. Micromanufacturing began in the mid-1960's with microelectronics fabrication technology. In the 1980's, Micro-Electro-Mechanical Systems (MEMS) began to be developed, in which electrical and mechanical subsystems were integrated at small scales. More recently, Microtechnology-based Energy...
More than 1.2 million people worldwide require regular hemodialysis therapy to treat end stage renal failure. In the United States alone, there are 300,000 patients and the National Kidney Foundation predicts that this number will double in the next 10 years. Currently most dialysis patients receive treatment at a dialysis...