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Filtering by: Committee Member Plant, Tom Advisor Wager, John F. File Format application/pdf

Development of oxide semiconductors : materials, devices, and integration

Creator:

Chiang, Hai Q.

Abstract:

The aim of this dissertation is to develop oxide semiconductors by radio-frequency sputtering for thin-film transistor (TFT) applications. A variety of oxide semiconductors are used as the TFT channel layer, including indium gallium oxide (IGO), zinc tin oxide (ZTO), and indium gallium zinc oxide (IGZO). The variety of materials used...

Resource Type:

Dissertation