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Filtering by: Contributor advisor sim Herman, Gregory S. Remove constraint Contributor advisor sim: Herman, Gregory S. Resource Type Dissertation Remove constraint Resource Type: Dissertation

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Characterization and Investigations of Thin-Film Materials with X-ray Photoelectron Spectroscopy

Creator:

Diulus, J. Trey

Abstract:

Surface characterization of materials is widely utilized over a range of disciplines and essential to the development of new materials, technology, or processes. Metal oxide nanoclusters have shown promise as potential new generation photoresist materials for extreme ultraviolet (EUV) nanolithography. Organotin clusters have been proposed as potential candidates for resist...

Resource Type:

Dissertation
Metal Oxide Cluster Chemistries for Next Generation Nanomanufacturing

Creator:

Frederick, Ryan T.

Abstract:

Metal oxide clusters are promising inorganic photoresists in next generation nanomanufacturing because of their potential for high-resolution and low line-edge roughness patterning, and exceptional sensitivity to extreme ultraviolet (EUV) radiation. In EUV patterning, absorption of EUV radiation leads to electron emission that serve as a primary species for driving radiation...

Resource Type:

Dissertation
Solution-based nanomaterials and thin films for next generation electronics

Creator:

Oleksak, Richard P.

Abstract:

Nanomaterials are expected to enable significant advances in several technological fields in coming years. Among them, electronics has emerged as one of the most likely benefactors from the ability to control matter on the nanometer-scale. For many electronic devices synthesized nanomaterials must be integrated into thin film structures. Vapor-based deposition...

Resource Type:

Dissertation
Functional materials for advanced energy and electronic devices

Creator:

Flynn, Brendan T.

Abstract:

Advances in energy technologies and electronics have typically occurred through either heightened performance or cost reduction. This dissertation explores both routes through a series of fundamental material studies that may contribute to the enabling of next generation devices. Solution based syntheses and deposition of chemical products offer a low cost...

Resource Type:

Dissertation

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Academic Affiliation

Chemical, Biological and Environmental Engineering4

Advisor

Herman, Gregory S.4

Commencement Year

Commencement Year range begin – Commencement Year range end

Current results range from 2014 to 2020

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Committee Member

Arnadottir, Liney2
Chang, Chih-Hung2
Baio, Joe1
Chang, Chih-hung1
Conley, Jr., John F.1
more Committee Members »

Creator

Diulus, J. Trey1
Flynn, Brendan T.1
Frederick, Ryan T.1
Oleksak, Richard P.1

Date

Date range begin – Date range end

Current results range from 2014 to 2019

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Decade

2010-20194

Degree Field

Chemical Engineering4

Degree Level

Doctoral4

Degree Name

Doctor of Philosophy (Ph.D.)4

Language

English [eng]4

License

All rights reserved4

Non-Academic Affiliation

Oregon State University. Graduate School2

Peer Reviewed

No4

Resource Type

Dissertation[remove]4

Rights Statement

In Copyright4

Subject

Electron-stimulated desorption1
Hafnium oxide1
Nanoparticles -- Synthesis1
Nanostructured materials -- Synthesis -- Technological innovations1
Photolithography1
more Subjects »

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