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Filtering by: Subject Thin films -- Electric properties Remove constraint Subject: Thin films -- Electric properties Committee Member Cann, David P. Remove constraint Committee Member: Cann, David P. Peer Reviewed No Remove constraint Peer Reviewed: No

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  • Development of perovskite thin films for use in piezoelectric based microelectromechanical systems

    Creator:
    Shelton, Christopher T.
    Abstract:
    The lead-zirconate-titanate (PZT) solid solution system is currently the workhorse of piezoelectric-based microelectromechanical systems (MEMS) research. Among bulk materials it is known to be one of the strongest piezoelectrics, with extremely high piezoelectric coefficients and electro-mechanical coupling factors. Reproducing these exceptional qualities in thin film form, however, requires precise tuning...
    Resource Type:
    Masters Thesis
    Full Text:
    - property relationships in the most widely used piezoelectric thin film, the perovskite Pb(Zr,Ti)O3. The

  • Amorphous metal thin films as a platform for solution processing

    Creator:
    Landau, Nicholas P.
    Abstract:
    The research presented herein represents an effort to combine the ultra-smooth surface of an amorphous metal thin film (AMTF) with a solution-processed dielectric synthesized via prompt inorganic condensation (PIC). Analysis of dielectric film quality is carried out via electrical measurements of metal-insulator-metal (MIM) diodes. Anneals at 500 and 700 °C...
    Resource Type:
    Masters Thesis
    Full Text:
    herein represents an effort to combine the ultra-smooth sur- face of an amorphous metal thin film (AMTF