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Filtering by: Committee Member Carlisle, Trevor K. Creator Cashen, Ryan K.

Concentration Effects on Enhanced Particle Removal with Viscoelastic Fluids

Creator:

Cashen, Ryan K.

Abstract:

Highly elastic solutions have been shown to increase contaminant removal from silicon wafers, indicating the possibility for reduced reliance upon hazardous chemicals and expensive technologies during the fabrication of semiconductor devices. The onset of this enhanced removal is explored using rinsing and siphoning experimentswith polymer fluids of high molecular weights...

Resource Type:

Honors College Thesis