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Filtering by: Creator Johnston, Brittany Remove constraint Creator: Johnston, Brittany Committee Member Carlisle, Trevor K. Remove constraint Committee Member: Carlisle, Trevor K.

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  • Concentration Effects on Enhanced Particle Removal with Viscoelastic Fluids

    Creator:
    Cashen, Ryan K.
    Abstract:
    Highly elastic solutions have been shown to increase contaminant removal from silicon wafers, indicating the possibility for reduced reliance upon hazardous chemicals and expensive technologies during the fabrication of semiconductor devices. The onset of this enhanced removal is explored using rinsing and siphoning experimentswith polymer fluids of high molecular weights...
    Resource Type:
    Honors College Thesis
    Full Text:
    has many people who I wish to thank. Thank you Kristin Mar- shall and Brittany Swann for answering